| Materials |
Category |
Applications |
Key requirements |
Section |
| Teflon PFA 450 HP |
PFA |
Etching tank lining |
| |
Contact with high-temperature concentrated sulfuric acid, hydrofluoric acid, and phosphoric acid mixtures.
Extremely resistant to strong acid corrosion; Very low metal ion precipitation; withstand thermal cycling (~150°C) without delamination.
Melt weldable, seamless, best overall sealing. |
|
Processing chamber and tank body |
| Teflon PFA 451 HP |
| Teflon PFA 950 HP Plus |
| Teflon PFA 951 HP Plus |
| Neoflon PFA 230 SH |
| Neoflon PFA 231 SH |
| Dyneon PFA 6502UHPZ |
| Dyneon PFA 8502UHPZ |
| Teflon PTFE 807N |
PTFE |
Cleaning tank lining |
| |
Contact with highly oxidizing cleaning solutions such as SC1 and SC2, Optimal chemical stability.
Resistant to oxidizing acids and hydrogen peroxide; extremely high cleanliness and surface smoothness; prevents chemical penetration. |
|
| Teflon PTFE NXT 70 |
| Teflon PTFE NXT 75 |
| Fluon ETFE ZL-522F |
ETFE |
| Fluon ETFE TL-580 |
| Fluon ETFE TL-581 |
| Fluon ETFE TL-584 |
| Tefzel ETFE HT-2195 |
| Teflon™ PFA HP 系列 |
PFA |
Photoresist development tank lining |
| |
Contact with alkaline developers and organic solvents.
Resistant to strong alkali corrosion; extremely low organic matter precipitation and precipitation; resistant to solvent stress cracking. |
|
|
| Solvay Hyflon® PFA |
| 巨化半导体级高纯PF |
| 东岳等半导体级高纯PFA |
| 圣莱科特 Halar® ECTFE |
ECTFE |
| NEOFLON™ PFA AP-213SH |
PFA |
etching machine inner liquid distribution pipeline |
| |
Transporting high temperature concentrated sulfuric acid/phosphoric acid/hydrofluoric acid mixture.
Extremely resistant to strong acid corrosion; ultra-low metal ion precipitation; resistant to thermal cycling (~150°C); ultra-high smoothness of the inner wall. |
|
|
Processing module internal pipeline |
| Teflon™ PFA HP系列 |
| 国产半导体级高纯PFA树脂 |
| 科慕 Teflon™ PTFE (高纯） |
PTFE |
| 3M Dyneon™ PTFE (高纯） |
| NEOFLON™ PFA AP-213SH |
PFA |
Wet Bench spray piping |
| |
Transporting oxidizing liquids such as SC1/SC2 and ozone water
Resistant to strong oxidants; extremely low total organic matter (TOC) emissions; high cleanliness; good flexibility for easy installation. |
|
|
| Teflon™ PFA HP系列 |
| 国产半导体级高纯PFA树脂 |
| 大金 NEOFLON™ FEP (高纯） |
FEP |
| 科慕 Teflon™ FEP (高纯 |
| NEOFLON™ PFA AP-213SH |
PFA |
Glue remover and developer solvent pipeline |
| |
Transporting organic solvents such as DMSO and MEA
Excellent resistance to solvent penetration and stress cracking; prevents swelling and deformation; high purity. |
|
|
| Teflon™ PFA HP系列 |
| 国产半导体级高纯PFA树脂 |
| 圣莱科特 Halar® ECTFE |
ECTFE |
| NEOFLON™ PFA AP-213SH |
PFA |
CVD/Diffusion furnace gas delivery piping |
| |
Transporting high-purity special gases and precursors
Extremely high airtightness and extremely low gas permeability; high temperature resistance (>200°C); ultra-high purity |
|
|
| Teflon™ PFA HP 系列 |
| 国产半导体级高纯PFA树脂 |
| NEOFLON™ PFA AP-213SH |
PFA |
Mixing Chamber and Manifold |
| |
Exposure to multiple alternating or mixed chemicals
The broadest spectrum of chemical resistance (acid, alkali, solvent); extremely low adsorption and precipitation; excellent dimensional stability to prevent internal leakage; capable of processing complex flow channels. |
|
|
Chemical mixing and dispensing unit |
| Teflon™ PFA HP 系列 |
| 国产半导体级高纯PFA树脂 |
| Arkema Kynar® PVDF (高纯级) |
PVDF |
| Solvay) Solef® PVDF |
| NEOFLON™ PFA AP-213SH |
PFA |
High-precision metering pump / diaphragm pump head |
| |
Direct drive, contact with chemicals
Excellent fatigue and creep resistance; good elastic recovery (for diaphragm pumps); resistant to long-term chemical immersion and pressure pulses |
|
|
| Teflon™ PFA HP 系列 |
| 国产半导体级高纯PFA树脂 |
| (Chemours) Teflon™ PTFE |
PTFE |
| 3M Dyneon™ PTFE |
| 瑞士乔治费歇尔 (Georg Fischer) SMS PFA 管材系统 |
PFA |
Conveying and distribution piping / joints |
| |
conveying and distribution piping/joints
Ultra-high cleanliness and inner wall smoothness; good flexibility (part of the pipeline); can be melt welded to achieve leak-free sealing. |
|
|
| 美国世伟洛克 (Swagelok) PFA管材与接头 |
| 符合 SEMI F57 标准的国产PFA管材 |
| NEOFLON™ PFA AP-213SH |
PFA |
Sensor housings |
| |
The parts of sensors such as pH and conductivity that come into contact with the liquid
Broad spectrum chemical resistance; excellent electrical insulation; no interference with measurement signals; high transparency (easy to observe and select) |
|
|
| Teflon™ PFA HP 系列 |
| 国产半导体级高纯PFA树脂 |
| 大金 NEOFLON™ FEP (高纯 |
FEP |
| 科慕 Teflon™ FEP (高纯） |
