| Fluororesin |
Category |
Applications |
Key requirements |
Section |
| Chemours Teflon PFA 450HP |
PFA |
Liner for etching tank |
| |
Contact with high-temperature concentrated sulfuric acid, hydrofluoric acid, and phosphoric acid mixtures.
Extremely resistant to strong acid corrosion; Very low metal ion precipitation; withstand thermal cycling (~150°C) without delamination.
Melt weldable, seamless, best overall sealing. |
|
Processing chamber and tank body |
| Chemours Teflon PFA 451HP |
| Chemours Teflon PFA 950HP Plus |
| Chemours Teflon PFA 951HP Plus |
| Daikin Neoflon PFA AP-230SH |
| Daikin Neoflon PFA AP-23SH |
| 3M Dyneon PFA 6502UHPZ |
| 3M Dyneon PFA 8502UHPZ |
| Chemours Tefzel ETFE 200 |
ETFE |
Liner for cleaning tank |
| |
Contact with highly oxidizing cleaning solutions such as SC1 and SC2, Optimal chemical stability.
Resistant to oxidizing acids and hydrogen peroxide; extremely high cleanliness and surface smoothness; prevents chemical penetration. |
|
| Chemours Tefzel ETFE 280 |
| Chemours Tefzel ETFE HT-2181 |
| Chemours Tefzel ETFE HT-2183 |
| Chemours Tefzel ETFE HT-2195 |
| AGC Fluon ETFE C-55AP |
| AGC Fluon ETFE C-55AXP |
| AGC Fluon ETFE ZL-522F |
| AGC Fluon ETFE TL-580 |
| AGC Fluon ETFE TL-581 |
| AGC Fluon ETFE TL-584 |
| Daikin Neoflon ETFE EP-541 |
| Solvay ECTFE Halar 901 |
ECTFE |
| Solvay ECTFE Halar 902 |
| Solvay ECTFE Halar 300 DA |
| Solvay ECTFE Halar 350 LC |
| Solvay ECTFE Halar 6012F |
| Chemours Teflon PFA 450HP |
PFA |
Liner for photoresist developing tank |
| |
Contact with alkaline developers and organic solvents.
Resistant to strong alkali corrosion; extremely low organic matter precipitation and precipitation; resistant to solvent stress cracking. |
|
|
| Chemours Teflon PFA 451HP |
| Chemours Teflon PFA 950HP Plus |
| Chemours Teflon PFA 951HP Plus |
| Daikin Neoflon PFA AP-230SH |
| Daikin Neoflon PFA AP-231SH |
| 3M Dyneon PFA 6502UHPZ |
| 3M Dyneon PFA 8502UHPZ |
| Solvay ECTFE Halar 901 |
ECTFE |
| Solvay ECTFE Halar 902 |
| Solvay ECTFE Halar 300 DA |
| Solvay ECTFE Halar 350 LC |
| Solvay ECTFE Halar 6012F |
| Chemours Teflon PFA 440HPB |
PFA |
Distribution tubes in etch tool for chemical liquid |
| |
Transporting high temperature concentrated sulfuric acid/phosphoric acid/hydrofluoric acid mixture.
Extremely resistant to strong acid corrosion; ultra-low metal ion precipitation; resistant to thermal cycling (~150°C); ultra-high smoothness of the inner wall. |
|
|
Processing module tubing system |
| Chemours Teflon PFA 445HB |
| Chemours Teflon PFA 940HP Plus |
| Chemours Teflon PFA 945HP Plus |
| Daikin Neoflon PFA AP-211SH |
| Chemours Teflon PFA 440HPB |
PFA |
Spray tubes of wet bench |
| |
Transporting oxidizing liquids such as SC1/SC2 and ozone water
Resistant to strong oxidants; extremely low total organic matter (TOC) emissions; high cleanliness; good flexibility for easy installation. |
|
|
| Chemours Teflon PFA 445HB |
| Chemours Teflon PFA 940HP Plus |
| Chemours Teflon PFA 945HP Plus |
| Daikin Neoflon PFA AP-211SH |
| Daikin Neoflon FEP NP-120 |
FEP |
| Daikin Neoflon FEP NP-20 |
| Chemours Teflon FEP CJ95 |
| Chemours Teflon FEP CJ99 |
| Chemours Teflon PFA 440HPB |
PFA |
Solvent tubes of photoresist stripper and developer |
| |
Transporting organic solvents such as DMSO and MEA
Excellent resistance to solvent penetration and stress cracking; prevents swelling and deformation; high purity. |
|
|
| Chemours Teflon PFA 445HB |
| Chemours Teflon PFA 940HP Plus |
| Chemours Teflon PFA 945HP Plus |
| Daikin Neoflon PFA AP-211SH |
| Solvay ECTFE Halar 300 DA |
ECTFE |
| Solvay ECTFE Halar 350 LC |
| Chemours Teflon PFA 440HPB |
PFA |
Chemical tubes for CVD and Diffusion furnace |
| |
Supplying process liquid chemicals and exhaust waste streams in CVD/diffusion tools.
Ultra-high purity with minimal leachable impurities；exceptional corrosion resistance and reliable, leak-free weldability |
|
|
| Chemours Teflon PFA 445HB |
| Chemours Teflon PFA 450HP |
| Chemours Teflon PFA 451HP |
| Chemours Teflon PFA 940HP Plus |
| Chemours Teflon PFA 945HP Plus |
| Chemours Teflon PFA 950HP Plus |
| Chemours Teflon PFA 951HP Plus |
| Daikin Neoflon PFA AP-211SH |
| Daikin Neoflon PFA AP-221SH |
| Daikin Neoflon PFA AP-230SH |
| Daikin Neoflon PFA AP-231SH |
| 3M Dyneon PFA 6502UHPZ |
| 3M Dyneon PFA 8502UHPZ |
| Chemours Teflon PFA 416HP |
PFA |
Mixing Chamber and Manifold |
| |
Exposure to multiple alternating or mixed chemicals
The broadest spectrum of chemical resistance (acid, alkali, solvent); extremely low adsorption and precipitation; excellent dimensional stability to prevent internal leakage; capable of processing complex flow channels. |
|
|
Chemical mixing and dispensing units |
| Chemours Teflon PFA 450HP |
| Chemours Teflon PFA 451HP |
| Chemours Teflon PFA 950HP Plus |
| Chemours Teflon PFA 951HP Plus |
| Daikin Neoflon PFA AP-201SH |
| Daikin Neoflon PFA AP-230SH |
| Daikin Neoflon PFA AP-221SH |
| Daikin Neoflon PFA AP-231SH |
| 3M Dyneon PFA 6502UHPZ |
| 3M Dyneon PFA 8502UHPZ |
| Akema PVDF Kynar 1000HD |
PVDF |
| Akema PVDF Kynar 710 |
| Akema PVDF Kynar 711 |
| Akema PVDF Kynar 9000HD |
| Solvay PVDF Solef 6010 |
| Solvay PVDF Solef 6012 |
| Chemours Teflon PFA 440HPA |
PFA |
Diaphragm / Chamber / Valves for metering pump |
| |
Direct drive, contact with chemicals
Excellent fatigue and creep resistance; good elastic recovery (for diaphragm pumps); resistant to long-term chemical immersion and pressure pulses |
|
|
| Chemours Teflon PFA 440HPB |
| Chemours Teflon PFA 940HP Plus |
| Chemours Teflon PFA 945HP Plus |
| Daikin Neoflon PFA AP-211SH |
| Daikin Neoflon PFA AP-221SH |
| 3M Dyneon PFA 6515UHPZ |
| 3M Dyneon PFA 8515UHPZ |
| Solvay PVDF Solef 6008 |
PVDF |
| Solvay PVDF Solef 1008 |
| Akema PVDF Kynar 460 |
| Chemours Teflon PTFE 62 X |
PTFE |
| Chemours Teflon PTFE 62N X |
| Chemours Teflon PTFE 62XT X |
| Chemours Teflon PFA 440HPA |
PFA |
Tubes / joints connecting all units & distributing mixed liquids |
| |
Connecting the units and converying the final mixed liquids.
Ultra-high cleanliness and inner wall smoothness; good flexibility (parts of the tubes); can be melt welded to achieve leak-free sealing. |
|
|
| Chemours Teflon PFA 440HPB |
| Chemours Teflon PFA 445HB |
| Chemours Teflon PFA 450HP |
| Chemours Teflon PFA 451HP |
| Chemours Teflon PFA 940HP Plus |
| Chemours Teflon PFA 945HP Plus |
| Chemours Teflon PFA 950HP Plus |
| Chemours Teflon PFA 951HP Plus |
| Daikin Neoflon PFA AP-230SH |
| Daikin Neoflon PFA AP-211SH |
| Daikin Neoflon PFA AP-221SH |
| Daikin Neoflon PFA AP-231SH |
| 3M Dyneon PFA 6502UHPZ |
| 3M Dyneon PFA 6515UHPZ |
| 3M Dyneon PFA 8502UHPZ |
| 3M Dyneon PFA 8515UHPZ |
| Chemours Teflon PFA 440HPA |
PFA |
Sensor housings |
| |
The parts of sensors such as pH and conductivity that come into contact with the liquids.
Broad spectrum chemical resistance; excellent electrical insulation; no interference with measurement signals; high transparency (easy to observe and select) |
|
|
| Chemours Teflon PFA 440HPB |
| Chemours Teflon PFA 940HP Plus |
| Daikin Neoflon PFA AP-211SH |
| 3M Dyneon PFA 6515UHPZ |
| 3M Dyneon PFA 8515UHPZ |
| Daikin Neoflon FEP NP-120 |
FEP |
| Daikin Neoflon FEP NP-20 |
| Chemours Teflon FEP CJ95 |
| Chemours Teflon FEP CJ99 |
